发明名称 |
Optical Member And Manufacturing Method Thereof |
摘要 |
An optical member utilizing diffraction, which comprises a substrate having a fine structure comprising microstructures with an interval of 50-1,000 nm between the adjacent microstructures on a substrate surface, wherein the substrate has a surface layer portion comprising a region containing fluorine atoms in an amount larger than that in the inner layer portion thereof. The microstructures are preferably micro-protrusions each tapering toward the tip in the direction perpendicular to the substrate surface. The optical member is manufactured by a method comprising a step of exposing the surface of the substrate having a fine structure comprising microstructures with an interval of 50-1,000 nm between the adjacent microstructures to an atmosphere containing a fluorine gas.
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申请公布号 |
US2008037124(A1) |
申请公布日期 |
2008.02.14 |
申请号 |
US20050547397 |
申请日期 |
2005.03.31 |
申请人 |
OHMI TADAHIRO;TANAHASHI NAOKI;HAYASHI MASAHIKO |
发明人 |
OHMI TADAHIRO;TANAHASHI NAOKI;HAYASHI MASAHIKO |
分类号 |
G02B27/42;G02B1/10;G02B1/11;G02B5/18;G02B5/30 |
主分类号 |
G02B27/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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