METHOD OF MANUFACTURING MICROLENS

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a microlens for forming the microlens whose shape is smooth in a simple method by possessing a shape in which the maximum film thickness position is different from a gravity position.

SOLUTION: The method of manufacturing the microlens has: a basic shape formation exposure process for performing exposure by using a mask for forming microlens basic shape to a photosensitive resin layer formed on a substrate; and a deformation exposure process for performing exposure having a unit cell exposure profile different from exposure during the basic shape formation exposure process by using the mask for microlens deformation to the photosensitive resin layer. The microlens in which the maximum film thickness position is different from the center of gravity is formed.

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