| 摘要 |
PROBLEM TO BE SOLVED: To provide a steam generating device capable of preventing bad influence on a substrate caused by contamination of a solvent by generating the steam while removing metallic components from the solvent. SOLUTION: Isopropyl alcohol in a container 75 is changed into steam by being heated by a heater 41, and supplied to the external from a supply opening 87, while allowing isopropyl alcohol stored in the container 75 to pass through circulation piping 47 to remove the metallic components. As the metallic components are removed even when the metallic components are included in isopropyl alcohol, the metallic components can be prevented from being included in the steam, and the bad influence on the substrate W caused by the contamination of isopropyl alcohol can be prevented. COPYRIGHT: (C)2008,JPO&INPIT
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