| 摘要 |
A semiconductor manufacturing apparatus for removing chemical smell is provided to improve the working environment for a worker by including a suction fan for sucking and exhausting the chemical smell. A semiconductor manufacturing apparatus for removing chemical smell comprises a chemical module part(140), a suction fan(120), an exhaust pipe(124), and a vacuum line(122). The chemical module part treats a process by using at least one chemical. The suction fan is installed in an upper part of the chemical module part, and sucks the chemical smell generated from the chemicals. The exhaust pipe is installed outside the chemical module part. The vacuum line connects the suction fan and the exhaust pipe, and exhausts the chemical smell sucked from the suction fan to the exhaust pipe.
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