| 摘要 |
PROBLEM TO BE SOLVED: To provide a microcontamination detector capable of easily obtaining misalignment of the optical axis. SOLUTION: The microcontamination detector S comprises a light projection unit 30 capable of emitting a laser beam, a light receiving camera 40 having a light receiving section 41 where imaging elements are arranged in a matrix shape on a light receiving surface 41A, and a controller 50. The controller 50 comprises a CPU 51, a control circuit 53, a flame memory 55, a RAM 56, a ROM 57, and the like. The controller 50 previously stores reference data based on image data of a detection area A1 in the RAM 56, and determines the existence of the misalignment of the optical axis by comparing detection data based on the image data of the detection area A1 with the reference data. When the presence of the misalignment of the optical axis is determined, the presence is reported to the outside, so that a worker can easily recognize that the misalignment arises in the optical axis. COPYRIGHT: (C)2008,JPO&INPIT
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