| 摘要 |
PROBLEM TO BE SOLVED: To provide a sapphire single crystal substrate for correcting a scanning probe microscope (SPM), which is used as a standard specimen for correction to achieve a desired height precision and, in particular, can be used for perceiving the height of a step and thus for achieving the smooth performance of the correction when a micro roughness or a level difference in the order of 10<SP>-10</SP>to 10<SP>-8</SP>m is measured by using SPM. SOLUTION: The sapphire single crystal substrate 1 includes approximately parallel and linear steps 2a each having the height of one molecular layer on a main surface, wherein the degree of the slope from a specific crystalline surface of the sapphire of the main surface or the width of a specific terrace 3a formed between the steps 2a takes a value in a specific range and each terrace described in the above has about the same width. COPYRIGHT: (C)2008,JPO&INPIT
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