| 摘要 |
An apparatus and a method for inspecting a substrate are provided to improve efficiency of inspection by rotating the substrate so as to inspect the substrate from two or more sides. An apparatus for inspecting a substrate comprises a substrate stage(60), a first inspection unit(P1) and a second inspection unit(P2). The substrate stage enables a substrate to rotate for inspecting the substrate in at least two directions. The first and second inspection units inspect the substrate in different directions.
|
