LOADIGN AND UNLOADING DEVICE FOR SUBSTARATE, AND THE METHOD THEREOF

摘要

An apparatus for transferring a substrate and a method for transferring the same are provided to rapidly and simply load the substrate on a base by separating a buffer from a pin to straightly drop the buffer without separating the buffer to the outside of the base. At least one through unit is formed on a substrate base. A substrate is received on the substrate base. At least one arm(215) are formed on a buffer(210). The arm passes through the through unit of the substrate base to move up and down. The arm is formed in parallel with the substrate base. The buffer includes a supporting unit(213) and the plural arms. The arm is vertically connected to the supporting unit. Plural buffer pins(217) are separated from an upper side of the arm and protruded. The buffer includes a driving unit(219) to move vertically. A contacted part of the pin and the substrate is made of an absorption head. The arm consists of a first arm unit and plural second arm units. The first arm unit is formed in the center of the buffer. The second arms are separated from the first arm unit and extended.