<p>An electrostatic chuck is provided to increase absorption force with respect to a large scale work by controlling an area ratio of a plus electrode and a minus electrode with respect to an absorption surface of a chuck body. An electrostatic chuck(15) absorbs and supports a work made of an electrical insulating material. A plus electrode(12a) and a minus electrode(12b) are formed in a chuck body(10). A plus voltage is applied to the plus electrode and a minus voltage is applied to the minus electrode. An area ratio of the plus electrode and the minus electrode with respect to an absorption surface of the chuck body is set to 60 % to 90 %. Volume resistivity of the chuck body is over 10^13 ohm.m. The plus electrode and the minus electrode are arranged in parallel to form a comb pattern.</p>
