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发明名称
摘要
申请公布号
JP4047978(B2)
申请公布日期
2008.02.13
申请号
JP19980255303
申请日期
1998.09.09
申请人
发明人
分类号
H01L31/0248;B01J19/12;H01L47/02
主分类号
H01L31/0248
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