发明名称 DRYING APPARATUS AFTER CLEANING FLAT PANEL DISPLAY
摘要 A drying apparatus after cleaning a flat panel display is provided to reduce equipment costs by reducing a size of equipment, reduce an occupation area on a production line, and reduce variables which has to be controlled during processes, thereby helping stable process control and equipment check, maintenance and repair. A drying apparatus(200a) after cleaning a flat panel display comprises a main body(210a), shafts(220) and an air knife(230). Both ends of the shafts are fastened with the main body. The shafts rotate by being mounted with plural rolls(225). The air knife is fastened with the main body at an angle less than 30 degrees, and jets air to the flat panel display moving above the shafts. The couple of air knifes are installed in upper and lower parts of the shafts.
申请公布号 KR20080012718(A) 申请公布日期 2008.02.12
申请号 KR20060073954 申请日期 2006.08.04
申请人 SEMES CO., LTD. 发明人 YOO, MIN SANG;KIM, BYUNG JEA
分类号 G02F1/13;H01L21/304 主分类号 G02F1/13
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