Nozzle cleaning apparatus, nozzle cleaning method, and a computer-readable storage medium storing nozzle cleaning program

摘要

Disclosed are a nozzle cleaning apparatus and a nozzle cleaning method, which are capable of effectively cleaning a nozzle for discharging a process liquid to a substrate, with a simple structure and a low cost. A nozzle 30 is accommodated in a cleaning container 2 having a funnel-shaped portion 2 b. A solvent T as a cleaning liquid is supplied along an inner surface of the funnel-shaped portion 2 b. The solvent T forms a vortex flow whirling around the nozzle 30 . By exposing the nozzle 30 to the vortex flow, the nozzle 30 can be effectively, thoroughly cleaned.