| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas laser oscillation device capable of stabilizing a gas flow at the gas merging section to be able to acquire the laser output of greater stability or a laser beam mode of reduced secular change. <P>SOLUTION: A laser gas passing through a first excitation unit 3a and a second excitation unit 3b is respectively channeled to a first and a second tapering gas passageway 61a, 61b, and merged in the vicinity of a central point 51 of the gas merging section 23, and travels in a gas passageway 62 in one stream. At this moment, the gas stream from the excitation unit 3a is deflected by a deflector 70a in the gas passageway 61a as indicated by arrows 80a and travels in the vicinity of -X direction in the gas marging section 23, and the gas stream from the excitation unit 3b is deflected by a deflector 70b in the gas passageway 61b as indicated by arrows 80b and travels in the vicinity of +X direction. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
