发明名称 SINTERED METAL COMPONENTS FOR CRYSTAL GROWTH REACTORS
摘要 An injector apparatus for a crystal growth reactor having a graphite casing, a stainless steel nozzle, a nozzle holder to position the nozzle within the graphite casing, a lower injector disposed within the graphite casing and extending around the nozzle to a point above the nozzle to direct gas flow from the nozzle, an upper injector comprising metal carbide disposed within the casing above the lower injector and spaced apart from the lower injector, and an upper injector.
申请公布号 US2008026591(A1) 申请公布日期 2008.01.31
申请号 US20070829375 申请日期 2007.07.27
申请人 CARACAL, INC. 发明人 KORDINA OLOF C.E.;RAO SHAILAJA
分类号 H01L21/02 主分类号 H01L21/02
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