| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas substitution/recovery method which enables a gas substitution without using a vacuum pump to repeatedly use a nitrogen gas for substitution so that a great amount of treatment can be carried out with a small amount of nitrogen gas. <P>SOLUTION: A valve V1-8 is opened/closed, the nitrogen gas is packed in a balloon 11, and thereafter the nitrogen gas in the balloon is injected into a substitution vessel 15, in which an adsorbent is packed, by driving of a pump 12 so that a gas to be treated in the substitution vessel is substituted by the nitrogen gas. The gas in the substitution vessel at this time is received in a buffer tank 3 of the latter part. Thereafter, a treatment component is desorbed from the adsorbent and a reduction treatment of the gas to be treated is carried out in the substitution vessel. Then, when a low-oxygen containing gas in the substitution vessel is sucked by pump driving to be returned to the balloon side, a gas mixed with oxygen is injected into a buffer tank 13 of the foregoing part with the same volume as the latter part to be repeatedly used as a buffer-tank packing gas. When the oxygen concentration is the determined value or above, the nitrogen gas in the balloon is introduced to purge an internal gas. <P>COPYRIGHT: (C)2008,JPO&INPIT |
