发明名称 PROCESS OF PRODUCTION OF PATTERNED STRUCTURE
摘要 A process for producing a patterned structure comprises imprinting a first pattern by pressing a stamper having a projection-depression configuration on the surface against an imprint-work layer, and imprinting a second pattern by displacing relatively the stamper from the position of the first pattern to another position on the imprint-work layer and then pressing the stamper against the imprint-work layer.
申请公布号 US2008023880(A1) 申请公布日期 2008.01.31
申请号 US20070773739 申请日期 2007.07.05
申请人 CANON KABUSHIKI KAISHA 发明人 IMADA AYA;DEN TORU
分类号 B28B11/08;B81C99/00 主分类号 B28B11/08
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