| 摘要 |
PROBLEM TO BE SOLVED: To provide a management system for a substrate treating apparatus capable of quickly and surely carrying out the notification of the generation of an alarm. SOLUTION: An alarm generating unit 402 monitors the state of the substrate treating apparatus 10, and generates the alarm when an anomaly occurs in the substrate treating apparatus 10. A mail forming unit 406 receives the alarm from the alarm generating unit 402, forms the main body of the mail whose content including the alarm, forms the header including the destination-data by referring to the destination stored in a destination storage unit 408 described later, and outputs the electronic mail including the main body of the mail and the header to a mail delivering unit 410. The mail delivering unit 410 delivers the electronic mail formed by the mail forming unit 406 to receivers other than the receiver for the operator, based on the procedure for transmitting the electronic mail via internet etc. COPYRIGHT: (C)2008,JPO&INPIT
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