| 摘要 |
A WAFER CONTAINER FOR SUPPORTING SEMI-CONDUCTOR WAFER DISKS AND FOR INTERFACING WITH PROCESSING EQUIPMENT AND METHODS FOR CONSTRUCTING THE SAME. WAFER SUPPORTS ARE POSITIONED WITHIN AN ENCLOSURE PORTION, THE WAFER SUPPORTS HAVING A PLURALITY OF VERTICALLY STACKED SHELVES FOR DEFINING SLOTS. THE WAFER SUPPORTS ARE SECURED WITHIN THE ENCLOSURE PORTION RIGIDLY AT THE BOTTOM MARGIN AND RESILIENTLY AT THE TOP MARGIN. IN PREFERRED EMBODIMENTS RESILIENT PLASTIC SPRING MEMBERS EXTEND BETWEEN THE CLOSED TOP AND THE WAFER SUPPORTS TO SUBSTANTIALLY CONSTRAIN LATERAL OR FORWARD-BACK MOVEMENT OF THE WAFER SUPPORTS WITH RESPECT TO THE CLOSED TOP AND TO PERMIT SOME VERTICAL MOVEMENT OF THE WAFER SUPPORT WITH RESPECT TO THE CLOSED TOP. THE SPRING MEMBERS MAY BE CONFIGURED AS A LEAF SPRING INTEGRAL WITH AN EXTENDING FROM THE TOP MARGIN OF EACH WAFER SUPPORT. |
