| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device structure capable of achieving the thickening of a clad by reducing a stress with respect to the clad having a large warping and a high softening temperature of a substrate; and to provide a method of manufacturing the same. <P>SOLUTION: The optical waveguide is composed of at least a flat plate-shaped Si substrate 11, a lower clad 12 of a silica glass having a ridge shape disposed on the substrate 11, and a core 13 disposed on the ridge of the lower clad 12, wherein, with respect to a ridge width of the lower clad 12, a distance L/2 from the center of the core 13 to the ridge end is a thickness d of the lower clad 12 just under the core 13 or more. A height h of the ridge is equal to or is more than half of the thickness d of the lower clad 12. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
