| 摘要 |
An optical measuring device includes: a screen having a reference line; a movable stage; an optical system for forming on the screen an optical image of a to-be-measured object placed on the stage; and an edge detecting sensor ( 112 ) for detecting a passage of a measurement edge of the optical image at an arbitrary position on the screen. The optical measuring device further includes: an offset value storage ( 143 ) storing a distance between the reference line and the edge detecting sensor ( 112 ) as an offset value; and a correction data calculator ( 144 ) for correcting measurement data measured with the reference line and the edge detecting sensor ( 112 ) by use of the offset value.
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