| 发明名称 |
Method of fabricating an artificial haircell |
| 摘要 |
Method of fabricating an artificial haircell. A cilium, a strain gauge connected to the cilium, and a ductile hinge are microfabricated on a substrate by surface micromachining. The cilium and the strain gauge are raised with respect to the substrate by application of a magnetic field, thus bending the hinge.
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| 申请公布号 |
US2008022513(A1) |
申请公布日期 |
2008.01.31 |
| 申请号 |
US20070880131 |
申请日期 |
2007.07.20 |
| 申请人 |
LIU CHANG;CHEN JACK;ENGEL JONATHAN |
发明人 |
LIU CHANG;CHEN JACK;ENGEL JONATHAN |
| 分类号 |
H01C17/28;G01F1/28;G01F1/684;G01K7/01;G01K7/18;G01L5/22;G01L19/00;G01N3/06;G01P5/12 |
主分类号 |
H01C17/28 |
| 代理机构 |
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代理人 |
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