发明名称 Semiconductor device and fabricating method thereof
摘要 A semiconductor device and method of manufacturing the same. The semiconductor device includes a semiconductor substrate having a first conductive layer, a second conductive layer on the first conductive layer, a first high density impurity area on the second conductive layer, and a second high density impurity area on the first impurity area; a trench exposing the first conductive layer; a gate insulating layer on an inner wall of the trench; a polysilicon layer on the gate insulating layer; and a metal layer on the polysilicon layer in the trench, in which the metal layer fills the trench.
申请公布号 US2008023756(A1) 申请公布日期 2008.01.31
申请号 US20070881035 申请日期 2007.07.24
申请人 DONGBU HITEK CO., LTD. 发明人 LEE CHANG MYUNG
分类号 H01L29/49;H01L21/02 主分类号 H01L29/49
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