The invention relates to a leakage seeker (10) having a pre-vacuum feed pump (20), a gas detector (18) and a flow sensor (26). The invention provides for a buffer volume (22) and a restrictor (24) to be arranged between the feed pump (20) and the flow sensor (26). This protects the flow sensor (26) against pressure surges generated by the feed pump.
申请公布号
WO2008012174(A2)
申请公布日期
2008.01.31
申请号
WO2007EP56639
申请日期
2007.07.02
申请人
INFICON GMBH;GERDAU, LUDOLF;ROLFF, RANDOLF, PAUL;ROLFF, NORBERT;WETZIG, DANIEL
发明人
GERDAU, LUDOLF;ROLFF, RANDOLF, PAUL;ROLFF, NORBERT;WETZIG, DANIEL