| 摘要 |
PROBLEM TO BE SOLVED: To prevent the break of a mirror due to an external vibration and a shock. SOLUTION: A substrate arranged with an open part for light incidence and reflection is provided at the upper part of a mirror substrate. When an electric voltage is applied on either an electrode 104a or 104b, a mirror is tilted by an electrostatic driving, and stops when the edge face of the mirror is made contact to a pivot 107 and an electrode substrate 101 before made contact to a stopper substrate 103. When the external vibration and the shock are given to the mirror and a beam supporting the mirror is deformed, the upper stopper substrate 103 and a frame 108 of the outer periphery of the mirror are made contact to each other, thus the movement of the mirror is suppressed and the break of the mirror is prevented. COPYRIGHT: (C)2008,JPO&INPIT
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