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发明名称
METHOD OF MEASURING POROSITY BY MEANS OF ELLIPSOMETRY AND DEVICE FOR IMPLEMENTING SUCH METHOD
摘要
申请公布号
EP1882173(A2)
申请公布日期
2008.01.30
申请号
EP20060764569
申请日期
2006.04.28
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
SIMON, GURVAN;FERRIEU, FREDERIC
分类号
G01N15/08;G01N21/21
主分类号
G01N15/08
代理机构
代理人
主权项
地址
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