| 摘要 |
<p>A substrate transfer apparatus includes first and second blades configured for supporting a substrate at different heights, respectively; an arm part connected to the first and second blades to move the first and second blades; and a drive unit configured for driving the first and second blades and the arm part, wherein the first and second blades are folded or unfolded while revolving on the same (single) axis of the arm part. According to the substrate transfer apparatus, a substrate processing throughput increases relative to a system area and time required for transferring and processing a substrate is reduced.</p> |
