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发明名称
SCRIBING APPARATUS, APPARATUS AND METHOD FOR CUTTING SUBSTRATE USING THE SAME
摘要
申请公布号
KR20090052484(A)
申请公布日期
2009.05.26
申请号
KR20070119005
申请日期
2007.11.21
申请人
SEMES CO., LTD.
发明人
KIM, MIN WOONG;KIM, SANG KIL
分类号
H01L21/301
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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