| 摘要 |
A pump (14) for use in operably evacuating a chamber (12) in a vacuum degassing apparatus (10) includes one or more pumping cavities (72, 74) that are in fluid communication with the chamber (12), and a continuous vent channel (80, 84) that has an outlet (83) disposed in fluid communication with a respective one of the one or more pumping cavities (72, 74). The vent channel (80, 84) is configured to provide dilution gas flow into the pumping cavity (72, 74) of the pump (14) at a rate sufficient to prevent solvent condensation in the pumping cavity (72, 74) during operation of the pump (14) in liquid degassing applications.
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