| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic image inspection device capable of correcting image blurring caused by a beam spot shape of an ultrasonic wave to obtain a clear ultrasonic image. SOLUTION: The ultrasonic image inspection device 1 includes a microscope main body 3, an objective revolver 4, an X-Y stage 5, and a personal computer 6. An objective lens 12 and an ultrasonic probe 13 are screwedly attached to the objective revolver 4. An optical image data of a reference plate 7 is acquired using the objective lens 12, ultrasonic image data of the reference plate 7 are acquired using an ultrasonic transducer 14 of the ultrasonic probe 13, and a correction data is found in response to the beam spot shape of the ultrasonic wave S<SB>0</SB>, based on the respective data. The ultrasonic image data is corrected along a direction to reduce the image blurring of the ultrasonic image, using the correction data. COPYRIGHT: (C)2008,JPO&INPIT
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