| 摘要 |
A vertical type substrate transferring apparatus is provided to reduce power required to lift the substrate by vertically transferring the substrate without lifting an erected substrate, solve particle faults, and more effectively transfer the substrate without clamping the substrate, thereby reducing tact time and foot print. A movement support unit(40) is installed in a lower area of a transfer line where a substrate(1), erected so as to be vertical to the ground, is transferred. The movement support unit movably supports a lower end of the substrate. At least a part of a substrate transfer unit(50) is contacted with a surface of the substrate so as to forcibly transfer the substrate from an upper part of the movement support unit. A substrate suction unit(60) sucks the substrate towards the substrate transfer unit so as to prevent the substrate from falling down towards an opposite side of the substrate transfer unit. |
