| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a beam radiation device capable of high-quality processings, and to provide a beam irradiation method capable of high-quality processing. <P>SOLUTION: The beam radiation device has a laser light source for emitting a laser beam; a beam splitter for branching the laser beam emitted from the laser light source into a first laser beam, in which a P polarizing component and an S polarizing component are mixed at a first ratio and a second laser beam, in which the P polarizing component and the S polarizing component are mixed at a second ratio that is different from the first ratio; and a circular deflecting device, arranged on an optical path of the first laser beam and for circularly polarizing the first laser beam. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
