| 发明名称 |
THIN-FILM DISPOSITION APPARATUS |
| 摘要 |
A dividing plate for a thin-film deposition apparatus divides the interior of the vacuum reaction chamber into a plasma discharge space and a film deposition process space, by fixing or connecting a plurality of laminated plates together by securely bonding them over the entire area of their interfacial surfaces, or a large portion thereof.
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| 申请公布号 |
US2008017500(A1) |
申请公布日期 |
2008.01.24 |
| 申请号 |
US20070834717 |
申请日期 |
2007.08.07 |
| 申请人 |
CANON ANELVA CORPORATION |
发明人 |
TANAKA MASAHIKO;IKEMOTO MANABU;YOKOGAWA NAOAKI |
| 分类号 |
C23C16/54;H01L21/205;C23C16/00;C23C16/44;C23C16/452;C23C16/455;H01J37/32 |
主分类号 |
C23C16/54 |
| 代理机构 |
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| 主权项 |
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