Particle Detection Device And Particle Detection Method

摘要

Electrodes for detecting the position of an incident particle are formed by a global position detection electrode for detecting the global position of the incident particle and a plurality of local position detection electrodes for detecting the local position of the incident particle. The position of the incident particle is identified from the global position information detected by the global position detection electrode and the local position information detected by the local position detection electrodes. A plurality of local position detection electrodes are divided into a plurality of groups and local position detection electrodes belonging to each group are connected to a common signal line. A predetermined number of local position detection electrodes correspond to one global position and the predetermined number of local position detection electrodes corresponding to one global position belong to different groups.