摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor which can be made compact and which is satisfactory in sensitivity with a comparatively simple configuration. SOLUTION: The configuration comprises a base section 51 made of a piezo-electric material; a tuning fork type piezoelectric vibrating reed 32, which is formed integrally with the base section and includes at least a pair of vibrating arms 34, 35 extending in parallel from the base section; and an vibrating means 11 for vibrating the piezoelectric vibrating reed. The piezoelectric vibrating reed 32 is arranged, such that the direction in which each vibrating arm extends, coincides with the direction G in which an acceleration to be detected acts on. When the acceleration is applied on, variations in the frequency of the piezoelectric vibrating reed are detected. COPYRIGHT: (C)2008,JPO&INPIT
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