摘要 |
PROBLEM TO BE SOLVED: To provide a purification apparatus capable of preparing a substance of higher purity with high yield and high productivity, and to provide a purification method. SOLUTION: The purification apparatus is constituted of a purification section for purifying a substance, and a carrier gas flowing therein is preheated to a higher temperature prior to its supply to the purification section and is subsequently supplied thereto as a carrier gas through a gas supply section of the purification section. By preheating the carrier gas, the difference of the temperature between the carrier gas and the purification section can be kept small. The carrier gas supplied to the purification section is discharged from the gas purification section through a gas discharge section attached thereto. COPYRIGHT: (C)2008,JPO&INPIT |