发明名称 PURIFICATION APPARATUS AND PURIFICATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a purification apparatus capable of preparing a substance of higher purity with high yield and high productivity, and to provide a purification method. SOLUTION: The purification apparatus is constituted of a purification section for purifying a substance, and a carrier gas flowing therein is preheated to a higher temperature prior to its supply to the purification section and is subsequently supplied thereto as a carrier gas through a gas supply section of the purification section. By preheating the carrier gas, the difference of the temperature between the carrier gas and the purification section can be kept small. The carrier gas supplied to the purification section is discharged from the gas purification section through a gas discharge section attached thereto. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008012479(A) 申请公布日期 2008.01.24
申请号 JP20060188235 申请日期 2006.07.07
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 IMABAYASHI RYOTA;KAWAKAMI SACHIKO;NAKAJIMA HARUE
分类号 B01D7/00;B01D3/10 主分类号 B01D7/00
代理机构 代理人
主权项
地址