| 摘要 |
PROBLEM TO BE SOLVED: To reduce the floor area of an indoor space occupied by a complex manufacturing device system and to positively prevent relative displacement or relative behavior of each manufacturing equipment constituting the manufacturing device system. SOLUTION: A manufacturing facility comprises the indoor space 1 and a lower layer space 6. An equipment base-isolating device 50 has upper layer and lower layer rigid floor structures 51, 52 and rigid posts 53 integrally connecting the upper and lower floor structures. The lower layer rigid floor structure 51 is supported on a floor structure 7 of the lower layer space 6 through base-isolating supports 60, 70, and the posts penetrate a floor structure 2 of the indoor space 1 in a horizontally displaceable manner to support the upper layer rigid floor structure 52 into the indoor space. First manufacturing equipment 10 of the manufacturing device system is fixed onto the upper layer rigid floor structure 52, and second manufacturing equipment 11 of the manufacturing device system is fixed onto the lower layer rigid floor structure 51. COPYRIGHT: (C)2008,JPO&INPIT
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