| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride based sintered compact which generates less grain drops and dust, for example a gas nozzle. <P>SOLUTION: The aluminum nitride based sintered compact comprises a substrate which has at least the surface part made of sintered particles comprising aluminum nitride as a main component and a plurality of concave parts opening to the surface whose periphery is covered with particles comprising the aluminum nitride as a main component, and a complex oxide containing a rare-earth element and aluminum, a part of which fills the concave parts and the other forms a film on the surface of the substrate so as to connect the concave parts. <P>COPYRIGHT: (C)2008,JPO&INPIT |
