| 摘要 |
A silicon microphone and a manufacturing method thereof are provided to prevent the distortion or deformation of a conductive layer by increasing the strength of the conductive layer of a diaphragm. A silicon microphone(10) includes a conductive layer(20), a plurality of support units, and a corrugation(23). The conductive layer has the center part which forms a diaphragm(21). The plurality of support units is arranged along the circumference of the conductive layer to support the conductive layer. The corrugation is formed inside the conductive layer, and is placed across an imaginary line between the plurality of support units. The corrugation is formed by partially reducing the thickness of the conductive layer. |
