A method for manufacturing susceptor,申请号KR20060038847-传众专利搜索

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发明名称	A method for manufacturing susceptor
摘要
申请公布号	KR100795776(B1)	申请公布日期	2008.01.21
申请号	KR20060038847	申请日期	2006.04.28
申请人		发明人
分类号	H01L21/683;H01L21/02	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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