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发明名称
Способ осаждени легированных пленок поликристаллического кремни
摘要
申请公布号
RU1780461(C)
申请公布日期
2008.01.20
申请号
SU19914904599
申请日期
1991.01.22
申请人
Научно-производственное объединение "Интеграл"
发明人
Турцевич А.С.;Красницкий В.Я.;Козлов А.Л.;Лесникова В.П.;Наливайко О.Ю.;Кастрицкий Л.В.
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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