ORGANIC EVAPORATOR, COATING INSTALLATION, AND METHOD FOR USE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an organic evaporator having long operational time and capable of performing the instantaneous control by the rate measurement. SOLUTION: The organic evaporator for applying organic vapor to a substrate at a coating rate comprises a distribution pipe with at least one nozzle outlet, and a measurement device for acquiring measurement data about at least one characteristic property of the organic vapor. COPYRIGHT: (C)2008,JPO&INPIT