| 摘要 |
PROBLEM TO BE SOLVED: To suppress the generation of ozone decomposition in a liquid sealing section, to eliminate the risk of the breakage of the apparatus, and to realize stable liquid ozone production. SOLUTION: A filler 8 is filled into liquid seal piping 6, and the inlet side and outlet side are provided with gauges 31, 32. By the control of a pressure regulation means V1 or the like practiced based on information regarding a liquid level detected by the gauges 31, 32, the feed of liquid ozone to the liquid seal piping 6 and the fixed holding of the liquid level in a separation boundary face 7 are made possible, the abnormal storage on the side of the separation boundary face 7 and the discharge of the liquid ozone to a vaporization section 2 are prevented, also, the liquid ozone is satisfactorily introduced into the vaporization section 2 with the filler 8 by its capillary force, and, on the other hand, the heat capacity in heat absorption is increased, and further, the liquid ozone in the liquid seal piping 6 is reduced. COPYRIGHT: (C)2008,JPO&INPIT
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