BEAM ASSEMBLY METHOD FOR LARGE AREA ARRAY MULTI-BEAM DUT PROBE CARDS

摘要

A method for fabricating beams for a probe card includes dividing a large beam panel (106) into smaller sub-panels (108) before attaching the beams to corresponding posts on a substrate. Each sub-panel may have a sufficient number of beams to test several devices under test. The beam sub-panels may be aligned to the space transformer using alignment fiducials on the beam sub-panels that correspond to opposing alignment features formed in the space transformer or other substrate. Special tie-bars may be formed between: (1) rows, for example, of beams and the frame/frame splines (i.e., quadrant tie-bars (200) ); and (2) adjacent beams within any such rows on the beam panel (i.e., beam tie-bars (400) ). The approach may also include the use of tip tie-bars and/or tail tie-bars.