| 摘要 |
PROBLEM TO BE SOLVED: To enable to put substrates into a cassette and store them without attachment of dust even if they are stored for a long time. SOLUTION: The substrate cassette holding device comprises a cassette 10 for storing substrates 1, a support base 21 for supporting the cassette 10 by the bottom face, a support base 22 for supporting the cassette 10 by the side face, and a cassette turning means (23) for turning these bases together with the cassette 10. The cassette turning means holds the cassette 10 in such a state that the film-formed or patterned planes of the substrates 1 may be inclined by an angle exceeding 90°with respect to the horizontal plane. COPYRIGHT: (C)2008,JPO&INPIT
|
