| 摘要 |
<P>PROBLEM TO BE SOLVED: To form patterns of second layer and thereafter at high alignment accuracy following the strain of black matrix patterns formed by step exposure. <P>SOLUTION: The method for drawing a color filter comprises: a stage where alignment marks formed on the outside of black matrix patterns in each shot on a substrate are read, and strain data showing the degree of the strain in the black matrix patterns of each shot are obtained; and a stage where, using a scanning exposure device provided with a plurality of exposure heads, scan exposure for forming patterns of second layer and thereafter on the substrate on an exposure stage moving to a scanning direction is performed. By controlling the optical system of each exposure head per region divided every alignment mark(s) of one or more formed at the outside of the black matrix patterns of each shot in accordance with the strain data of the black matrix patterns of each shot, the exposure patterns for forming the patterns of second layer and thereafter are compensated. <P>COPYRIGHT: (C)2008,JPO&INPIT |
