| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus and method, capable of uniformly forming a dense ceramic film on a surface of a substrate, particularly on an outer circumferential curved surface of the substrate such as a bearing periphery part, by the AD method. SOLUTION: The film-forming apparatus 1 is equipped with an aerosol-generating device 11, a vacuum chamber 2, a mask 6 which is arranged inside the vacuum chamber 2 and has an aperture in a prescribed manner relative to the substrate 7 serving as a film formation target, a rotary member 5 that has a circumferential curved surface and rotates in the circumference direction, and an aerosol injection nozzle 12. An aerosol is injected by the aerosol injection nozzle 12 and made to undergo primary collision against the circumferential curved surface of the rotary member 5, and ceramic particulates in the aerosol rebounding from the circumferential curved surface of the rotary member 5 are made to undergo secondary collision against the surface of the substrate 7 via the mask 6 to form the ceramic film. COPYRIGHT: (C)2008,JPO&INPIT
|
