| 摘要 |
PROBLEM TO BE SOLVED: To provide a floating unit capable of floating and conveying a glass substrate without warping it. SOLUTION: When air is supplied to the air-tight space of a chamber 36 by a compressor, the air is jetted from vent holes 72, 74 extending through the groove bottoms of a circle groove part 66 and a lattice groove part 68 formed in a ceiling wall. Since a porous plate 76 is secured to a ceiling wall, the air is uniformly distributed over the lower surface of the porous plate 76 while flowing along the groove parts, and jetted from the gaps of the porous plate 76. Namely, since the air is jetted from the entire surface of the porous plate 76, the entire surface of the porous plate 76 is formed in an air bearing surface. Consequently, the glass substrate P can be floated and conveyed without warping it. COPYRIGHT: (C)2008,JPO&INPIT
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