发明名称 WAFER CASSETTE
摘要 <p>A front opening wafer container including an enclosure portion and a door. A wafer support system is provided including a pair of spaced apart cantilever wafer shelves, each wafer shelf including a pair of opposing inclined ramp portions. The ramp portions are cooperatively positioned and configured so that when the wafer is received on the shelves, the wafer is supported on the ramps at a lower peripheral corner of the wafer, all other portions of the wafer being free from contact with the wafer support system. Each wafer shelf may have a generally concave upper surface and the incline of the ramps is continuous with the concave upper surfaces of the wafer shelves.</p>
申请公布号 WO2008008270(A2) 申请公布日期 2008.01.17
申请号 WO2007US15523 申请日期 2007.07.06
申请人 ENTEGRIS, INC.;FULLER, MATTHEW, A.;BURNS, JOHN 发明人 FULLER, MATTHEW, A.;BURNS, JOHN
分类号 B65D85/30 主分类号 B65D85/30
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