| 摘要 |
PROBLEM TO BE SOLVED: To compare accurately measured data of two measuring groups. SOLUTION: A reliability test is performed relative to one-lot image sensors 11. Each electric characteristic of Ref lot wherein a test is not performed and tested Try lot is measured. A value showing high-order 5% of Ref measured data Xr of the Ref lot is defined as UpIR, and a value showing low-order 5% is defined as LoIR. A value showing high-order 5% of Try measured data Xt of the Try lot is defined as UpIT, and a value showing low-order 5% is defined as LoIT. The number (Zup) of Xt satisfying inequalities: UpIR<Xt≤UpIT and the number (Zlo) of Xt satisfying inequalities: LoIT≤Xt<LoIR are determined. Each ratio of Zup and Zlo to the number of all the Try measured data Xt is determined. After removing abnormal data deviated greatly from a mean value, the direction and the degree of deviation of an Xt distribution from an Xr distribution can be confirmed numerically. Hereby, comparison between both measured data can be performed accurately. COPYRIGHT: (C)2008,JPO&INPIT
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