METHOD FOR THE PRODUCTION OF A CERAMIC SUBSTRATE, AND A CERAMIC SUBSTRATE
摘要
The invention relates to a method for the production of a ceramic substrate of a semiconductor component, characterized by the following steps: producing paper comprising at least cellulose fibers, and a filler and/or SiC to be carbonized; pyrolizing the produced paper; and siliconizing the pyrolyzed paper.
申请公布号
WO2008006900(A1)
申请公布日期
2008.01.17
申请号
WO2007EP57241
申请日期
2007.07.13
申请人
SCHUNK KOHLENSTOFFTECHNIK GMBH;EBERT, MARCO;HENRICH, MARTIN;LAUER, ANDREAS;NAUDITT, GOTTHARD;SCHEIBEL, THORSTEN;WEISS, ROLAND
发明人
EBERT, MARCO;HENRICH, MARTIN;LAUER, ANDREAS;NAUDITT, GOTTHARD;SCHEIBEL, THORSTEN;WEISS, ROLAND